Business Type:
Trading Company
Business Range:
Photoresister Dispense Pump, KT3000R, Belt transfer system, KT2000S, Restored Track System
Establishment:
2012
R&D Capacity:
OEM, ODM, Others
Terms of Payment:
LC, T/T, D/P, Paypal, Western Union
Main Markets:
North America, Europe
OEM/ODM Service
Sample Available

1
    YRS
General Supplier

Transfer Track

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Min. Order / Reference FOB Price
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Local Area: South Korea
R&D Capacity: OEM, ODM, Other
Payment Terms: LC, T/T, D/P, Paypal, Western Union

100mm/150mm
Upgrade for water belt transfer track by KS Tech KT2000S series are readily available to enhanced the process capability of this system.
Automated photolithography processing system PC-Controller operation / process recipe user programmable Operator mode / Engineer mode / Supervisor mode.
Photoresist coater module, Developer module, HMDS bake and chill plate module.

Coater Module Features
The coater module dispense arm position is programmable, and the spindle assembly has computer controller chuck Height.
The KS Tech catch cup assembly that incorporate an automatic bowl rinse.
The rinse cycle is a process programmable variable and can be executed during any desirable point before, during or after production.
Desirable process benefits of the catch cup are the elimination of mist and improved uniformity.
Developer Module Features
The new designed developer bowl has exhaust which provides improved uniformity. Low impact nozzle are also used to improve uniformity.
Dispense function and dispense arm position are controlled from the user interface computer.
Chill Plate Modules Feature
18-30 Deg Temp Range
Proximity Bake Type
3 Pin Cylinder up/down
HMDS / HPO / Chill Plate Module Features
The hot plate and the chill plate interchangeable and and require only a simple replacement of the heat transfer element.
Hot plate and chill plate temperature are user specified within the recipe.
As an option the hot plate and chill plate is offered with fixed gap proximity bake and cooling.

Hot Plate Modules Feature
The Teflon coated indexer is stepper motor driven for precision.
Wafer sensing is accomplished through either fiber optic sensor.

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Mr. Kee-Sun Ahn
Sales Department
Sales Manager