MEMS Mass Flow Sensor Model for Medical Flow Detection FS1015CL sensor

MEMS Mass Flow Sensors Model FS1015CL
FS1015CL Gas Flow Sensors Description
FS1015CL mass flow sensors are specially designed for medical equipment flow monitor and control applications, and are made with world leading proprietary MEMS mass flow designed channel with a low pressure loss. The current models can be readily applied to ventilators and anesthesia equipments. These sensors can also be sterilized in medical liquids for reuse or hygienic purposes.FS1015 Series can measure a flow up to 150 SLPM. ISO-15mm connection model is readily applicable to ventilators and/or anesthesia equipments.FS1015CL Gas Flow Sensors Features and Applications
- MEMS thermal mass flow sensor
- Excellent rangeability with integrated multiple sensing elements
- High stability at null and full scale
- Fast response
- Low power consumption
- Low pressure loss
Working Principle
(1) The MEMS sensor chip utilizes the calorimetric principle.
(2) It is packaged on a plate installed inside the flow channel, which provides additional flow conditioning from the boundary layer configuration resulting in a laminar flow.
(3) The mass flow measurement is established as the gas carries heat away from the heater leading to the redistribution of the temperature field.
(4) Accurate flow rate is obtained by calibration with standard gas at preset conditions.
FS1015CL Gas Flow Sensors Mechanical Dimensions
FS1015CL Gas Flow Sensors Performance Specifications
All data unless otherwise noted apply for calibration conditions: air, 20 °C, 101.325 kPa absolute pressure, horizontal mounting. ModelFS1015UnitFlow Range0 ~ 100; 0 ~ 150SLPMTurn-down Ratio> 100 : 1 Accuracy± (2.0 + 0.5 FS)%Repeatability± 0.5%ReadingNull Shift± 30mVOutput Shift± 0.12%/°CResponse Time8 (max.)msOutputLinear, Analog 0.5 ~ 4.5 Vdc Max. Pressure Drop1300 Typ.PaMax. Operation Pressure0.2MPaPower Supply5 ± 1%VdcOperating Current< 10 (no output load)mAPower Consumption< 50mWAnalog Output LoadSourcing: 25mASinking: 15Working Temperature-10 ~ +55°C
FS1015CL Gas Flow Sensors Product Selection