MEMS differential pressure sensor for Ventilators

General Description
P200 series MEMS differential pressure sensors measure ultra-low gas pressures covering the range of up to ±500Pa (±2 inH2O). The technology is based on it ’s highly successful proprietary CMOS thermal accelerometers already sold in millions. thermal flow sensing element is monolithically integrated with CMOS signal processing circuitry and embedded software capable of converting gas flow rates to a digital format. The signal is linearized and temperature compensated. P200 series offers incredible sensitivity detecting pressure down below 0.02 Pascal near zero differential pressure. Other
features include wide dynamic range, superb long-term stability, and outstanding repeatability and hysteresis.
Features
• Pressure range up to ±500Pa with high accuracy of ±3.0% m.v.
• Pressure based on thermal micro-flow measurement
• Outstanding hysteresis and repeatability
• Linearized and temperature compensated
• Digital I 2 C with 16bit resolution
• Cost effective
• RoHS and REACH compliant
• Minimum detectable pressure difference as low as
0.02 Pascal

Applications
• Medical CPAP and ventilator
• HAVC and building
• Burner control
• Filter monitoring
• Process control and automation
1. Performance 1)
1) All sensor specifications are valid with air as medium at 3 C temperatures with 1 standard
atmospheric pressure (101325Pa), 50% RH, and a 3.3V DC power supply, unless otherwise
specified. Customized versions are available, please contact factory for calibration under other
conditions of pressure ranges, temperatures, and gases
2) Accuracy specifications apply over operating conditions. With 16-bit resolution, this accuracy
represents the total of non-linearity, hysteresis, zero and span shift, repeatability and
temperature effects.
3) P200 operates based on thermal mass flow principle. Gas flow is required to measure the
pressure difference.
2. Environment
3. Electrical
4. Material
5. I 2 C Interface
Pinout Configuration
about us
Rainbow Technology is a world leading provider of MEMS sensor (Micro) platforms. Main products including MEMS Gas sensor(VOC,CH4,CO,CH2O,C3H8,NH3,H2S,NO2,CO2 etc...), Pressure sensor, Temperature sensor, Flow sensor, Inertial Sensor, Our products can alternate to Bosch, Honeywell, TE, InvenSense, Knowles.


We design and produce sensors for a wide variety of industries including: Automotive, Industrial, Agricultural, Transportation, Alternative Energy, Environment, Mining, Medical, Aerospace, and Military.

Whether you require a one time replacement or prototype sensor, or you are looking for an OEM source for a sensor to meet your specific needs, we offers thousands of combinations of sensing technologies, and our Engineers are always happy to help guide you through or make recommendations based on your requirements.
For more information, please contact us.