TYFB-600 Molecular vacuum pumpTY series of complex molecular pump combined by a turbo molecular pump and disc traction pump, it has the specialty both of them,high pumping seed and high compression ratio,which extends the application range of molecular pump.
The pumped gas compound molecular pump is non-selective, no memory effect, the pump can get clean high vacuum and ultra-high vacuum without cooling well and the oil baffle. It’s widely used in photovoltaics, lighting, aerospace, semiconductor, energy, military, laser, appliances, materials, automobiles and other vacuum technology in various fields.TYFB-600 Complex Molecular Pump
TYFB-1200 Complex Molecular Pump
TYFB-1600 Complex Molecular Pump
High vacuum flange(mm)
150 CF
160 ISO-K
200 CF
200 ISO-K
250 CF
250 ISO-K
Foreline flange(mm)
40 KF
40 KF
50 KF
Pumping seed(L/S)
600
1200
1600
Compression ratio
N2
>109
>109
>109
H2
>8X103
>1X104
>1X104
Ultimate preesure(Pa)
<8x10-8
<5x10-7
<8x10-8
<5x10-7
<8x10-8
<5x10-7
Rotary speed(n/min)
24000
24000
21000
Vibration values
≤0.1μm
≤0.1μm
≤0.15μm
Start-up time(min)
<5
<5
<6
Recommended forepump
4-8 L/S
8-15 L/S
15 L/S
Cooling type
Cooling(Air-cooled)
Cooling(Air-cooled)
Cooling(Air-cooled)
Air cooling temperature
≤25°C
≤25°C
≤25°C
Water cooling temperature
≤20°C
≤20°C
≤20°C
Water cooling water flow(L/min)
1
1
1
Balking temperature Pump
<120°C
<120°C
<120°C
Heater power(w)
<550
<600
<700
Heater input voltage(v)
AC220
AC220
AC220
Installing direction
Vertial±5°
Vertial±5°
Vertial±5°
Weight(kg)
≈29
≈34
≈39