Ceramic tiles vacuum coating equipment

Product Description
1. High deposition rate, High coating speed, It can be widely used to do the decorative coating, functional coating on a variety of products. So it is a ideal equipment to do the high-grade and best coating for mass production.
2. Magnetron sputtering principle is based on the theory of the cathode glow discharge, it expend the cathode surface magnetic field near the work piece surface. Then it improves the sputtered atomionization rate. It keeps the magnetron sputtering uniformity, also can improve the surface shining effect.
3. The arc plasma evaporation source is reliable, it can work under 40A current in optimizing the cathode and the magnetic field structure,. It will happen atomic diffusion between the coating and the material. It also has the advantages that lon Beam Assisted Deposition.
4. Vacuum pumping system, electric control system and complete vacuum coating system can be customized according to user requirements.
Technical Parameters
vacuum multi Ion coating equipment main model and parameters
Model
LZ-800
LZ-1000
LZ-1300
LZ-1600
LZ-1800
LZ-2200
Vacuum chamber
800*800
1000*1100
1300*1300
1600*1800
1800*3000
2200*4000
Arc target amount
4 or 6pcs
6 or 8pcs
12 or 14pcs
16 or 18pcs
30 or 32pcs
38 or 40pcs
bias supply
15KW/pcs
20KW/ pcs
42KW/ pcs
50KW/pcs
60KW/pcs
80KW/ pcs
Total power
30KW
40KW
60KW
80KW
125KW
195KW
Power supply type
Arc power source, filament power, pulsed bias power supply
Chamber structure
Vertical & front door, rear pumping system, double water-cooling chamber
Chamber material
Stainless steel
Ultimate vacuum
6.0x10-4Pa
Pump-down time
8.0x10-3Pa≤15min
Vacuum system
Diffusion pump or molecular pump +Roots pump +Mechanical pump+ holding pump(can be allocated by customer’s requests)
Workpiece system
Rotation of the planet forms, frequency regulation(adjusting rotation speed)
Workpiece heating temperature
From room temperature to 450°C, adjustable control(PID temperature control)
Process gas
3-channel or 4-way process gas flow control and display system, matching automatic refueling systems
Water-cooling system
Water circulation cooling system, and water tower or industrial chiller or deep-cooling system(supply by customer)
Control method
Manual/automatic all-in-one,touch screen,PLC or computer operation
Alarming and protection
Alarming for short of water, overcurrent, overvoltage and circuit break, etc of pump and target, and carry out protections and electrical interlocking functions
Other technical parameters
Water pressure≥0.2MPa,water temperature≤25°C,air pressure0.5-0.8MPa
Remarks
Configuration of coating equipment can be designed according to the requirement of the coated products
PVD coating machine
pvd coating process
Certifications