pvd vacuum coating machine

Continous Magnetron Sputtering Coating Machine for glass mirror/bright mirror effect/shiny
Product Description
AZO film magnetron sputtering continuous production line has seven vacuum chambers:inlet chamber→inlet buffer chamber→inlet transfer chamber→processing chamber→outlet transfer chamber→outlet buffer chamber→outlet chamber.
2 pairs MF twins Si target which adopts PCU04 closed loop control. The high quality isolated SiO2 layer is formed. 10 pairs cylinder AZO target to achieve high-quality transparent conductor AZO film. The designed processing size si width 1100mm, length 1400mm plan substrate material. Production and processing cycle can be optimized to 60-120 seconds, production line using molecular pump form isolated gas advance design, production line using floating turbo molecular pump to get efficient isolation, stable pumping speed and uniform gas distribution.
The production line is used in the thin film solar cell. The transparent conductive film is used as an antireflective layer and a transparent electrode used in solar energy conversion efficiency can be improved, with the AZO thin film instead of ITO, can not only reduce the production cost, environmentally friendly and non-toxic, the film performance more stable.
Features of production line:
1. Type of equipment: vertical / horizontal continuous magnetron sputtering coating line
2. Carrier size: designed as 1x1100mm(W)x 1400mm(L)x3mm
3. Uniformity of the film: in the effective deposition area, the film thickness uniformity ≤ ±5%
4. Cathode structure design: adopts medium frequency twin rotary cathode, target specifications depending on the product
5. Transmission mode: adopt the mold of double friction-driving conveying device (do not use wheel design)
6. Coating process method : adopt ZnO:Al ceramic target and reactive sputtering deposition process
7. Coating temperature control: stainless steel sheathed heating device ( heating lamps can be equipped by requested), the temperature can be set from room temperature to 350℃(±5℃).
8. Control system: configuration software combining with PLC can realize man-machine conversation so as to make the necessary timely intervention on the survival process. There has alarm and fault display during the operation.
Technical specification:
1. Ultimate vacuum:6x 10-4 Pa
2. Average production cycle: 80~180 sec/frame (According to the product features)
3. Carrier size: 1100 mmx 1400mm (can be customized by requested)
4. Film uniformity: ± 3%
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