10L Vacuum Plasma Cleaner Plasma Surface Processor for Semi-conductor Wire Bonding
Product Description
ModelTS-PL02/05/10Cavity materialStainless steel surface treatmentPower frequency40KHz/13.56MHzPower300/500/600WWorking currentThe overall working current shall be no more than 1.2A (excluding vacuum pump)Vacuum degree30pa-100paGas flow0-100ml/sCleaning timeAdjustable(1-100miniutes)Gas channelTwo-way working gas:oxygen and argon,etcCooling modeAir coolingControl modeMan-machine interfaceVacuum cavity temperatureless than 50℃Vacuum pumpOil pump/dry pump(optional)Volume2L/5L/10LCavity dimensions(LxWxH)mmDiameter:100*270mm/150*280mm/200*200*270mmOverall dimensions(LxWxH)mm550*600*400mm/660*700*600mm/660*700*600mmApplicationGlass,Touch green,Material science,Printing,Paper manufacturing,Ink coating,Medicine & healthcare,Thin film polymer,Electronic
circuit,Textile fibre,Chemistry and chemical industry,petrochemical industry.Featurea.mainly applicable to small scale production and scientific experiment
b.small volume,tight structure and easy to operate and maintain
c.german core plasma technology
d.imported 316 stainless steel material,corrosion resistant
e.imported needle value precise flow controlling machine
f.two-way process gas channel
g.customization available
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